Search Results - "Assayag, G. Ben"
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1
Extended defects in shallow implants
Published in Applied physics. A, Materials science & processing (01-05-2003)“…Extended defects are often found after ion implantation and annealing of silicon and they are known to affect dopant diffusion. The article reviews the…”
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2
Controlled fabrication of Si nanocrystal delta-layers in thin SiO2 layers by plasma immersion ion implantation for nonvolatile memories
Published in Applied physics letters (16-12-2013)“…Plasma Immersion Ion Implantation (PIII) is a promising alternative to beam line implantation to produce a single layer of nanocrystals (NCs) in the gate…”
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3
A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si
Published in Applied physics letters (14-02-2000)“…Proton implantation and thermal annealing of silicon result in the formation of a specific type of extended defects involving hydrogen, named “platelets” or…”
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4
Effect of Germanium content and strain on the formation of extended defects in ion implanted Silicon/Germanium
Published in Thin solid films (26-02-2010)“…We studied the evolution of extended defects in relaxed and strained Si and SiGe structures after an amorphising implant. The investigated structures included…”
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5
Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process
Published in Physica status solidi. A, Applications and materials science (01-02-2007)“…We propose an original approach called “stencil‐masked ion implantation process” to perform a spatially localized synthesis of a limited number of Si…”
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6
Structural and magnetic properties of N + -irradiated Co/Pt multilayers with perpendicular bimodal behaviour
Published in Journal of magnetism and magnetic materials (01-08-2007)“…We report on microstructural and magnetic investigations of the modification of (Co 0.5 nm/Pt 6 nm) 15 multilayer (ML) films by 150 keV nitrogen ion…”
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7
Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications
Published in Solid-state electronics (01-11-2005)“…In this work, we show how to manipulate two-dimensional arrays of Si NCs in thin (⩽10 nm) SiO 2 layers by ultra-low-energy (⩽1 keV) ion implantation and…”
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8
An electron microscopy study of the growth of Ge nanoparticles in SiO2
Published in Applied physics letters (26-06-2000)“…Ion implantation followed by high temperature annealing can be used to synthesize group IV semiconducting nanoparticles in SiO2. The density and the size…”
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9
From continuous to quantized charging response of silicon nanocrystals obtained by ultra-low energy ion implantation
Published in Solid-state electronics (01-07-2005)“…In this paper, we present a study on the contribution of silicon nanocrystals to the electrical transport characteristics of large (100 μm × 100 μm) and small…”
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10
Characterization of silicon nanocrystals embedded in thin oxide layers by TOF-SIMS
Published in Applied surface science (15-06-2004)“…In this paper TOF-SIMS is used to characterize nanocrystals synthetized by ion implantation and subsequent annealing. The variation of the Si n − signals…”
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11
Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation
Published in Microelectronic engineering (01-09-2007)“…This work presents an alternative method for the formation of the top oxide in oxide-nitride-oxide structures. The method utilizes low-energy (1 keV) Si ion…”
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12
Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon
Published in Applied physics letters (12-02-2001)“…In this letter, a physically based model describing the kinetic evolution of extrinsic defects during annealing is presented. The fundamental concepts of…”
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13
Ion beam synthesis of GaN precipitates in GaAs
Published in Materials science & engineering. B, Solid-state materials for advanced technology (30-05-2002)“…In this paper, we report on the fabrication of GaN nanoparticles by ion implantation of nitrogen in GaAs and subsequent thermal annealing. The samples are…”
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14
Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers
Published in Applied physics letters (19-11-2007)“…White and tunable electroluminescence has been obtained by field effect injection in 40nm thick Si- and C-rich SiO2 layers. The films, synthesized by ion…”
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15
Ostwald ripening of Ge precipitates elaborated by ion implantation in SiO2
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01-01-2000)Get full text
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16
Room-temperature quantum effect in silicon nanoparticles obtained by low-energy ion implantation and embedded in a nanometer scale capacitor
Published in Applied physics letters (18-04-2005)“…In this article, we present the room-temperature current-voltage characteristics of a nanometer scale (100×100nm2) metal-oxide-semiconductor capacitor…”
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17
Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications
Published in Microelectronic engineering (01-07-2009)“…Structural and electrical properties of ALD-grown 5 and 7 nm-thick Al2O3 layers before and after implantation of Ge ions (1 keV, 0.5–1 × 1016 cm−2) and thermal…”
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18
Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology
Published in Applied physics letters (20-09-2004)“…Scalability and performance of current flash memories can be improved substantially by replacing the floating polycrystalline-silicon gate by a layer of Si…”
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19
Magnetic easy-axis switching in Co/Pt and Co/Au superlattices induced by nitrogen ion beam irradiation
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-04-2007)“…In this paper, the sputtering-grown [Au 6nm/Co 0.5nm]×10 and [Pt 6nm/Co 0.5nm]×15 superlattices are irradiated using N+ 150keV ions with fluences ranging from…”
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20
Nanocrystals manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-02-2004)“…An overview of recent developments regarding the fabrication and structure of thin silicon dioxide films with embedded nanocrystals through ultra-low-energy…”
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