Search Results - "Ashizawa, Hiroaki"
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Plasma Exposure Behavior of Yttrium Oxide Film Formed by Aerosol Deposition Method
Published in IEEE transactions on semiconductor manufacturing (01-11-2017)“…Aerosol deposition (AD) method is technique for forming high density ceramic films on substrate material surface at room temperature. The yttrium oxide films…”
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Effect of the microstructures of yttria ceramics on their plasma corrosion behavior
Published in Ceramics international (01-12-2019)“…To demonstrate the relation between the microstructure of ceramics and their plasma corrosion behavior, sintered yttria (Y2O3) ceramics with various grain…”
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Plasma‐resistance evaluation of yttrium oxyfluoride coating prepared by aerosol deposition method
Published in International journal of applied ceramic technology (01-01-2022)“…To suppress particle contamination and process drift, there is a strong demand for plasma‐resistant coatings that prevent corrosion of the inner ceramic…”
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Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method
Published in Journal of the American Ceramic Society (01-12-2020)“…Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via…”
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5
Performance characteristics of narrow linewidth fiber laser pumped mid-IR difference frequency mixing light source for methane detection
Published in Japanese Journal of Applied Physics (01-03-2003)“…A high-power, narrow-linewidth Yb fiber laser with a fiber Bragg grating (FBG) pumped difference frequency generation (DFG) in a periodically poled lithium…”
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Plasma erosion behavior of yttrium oxide film formed by aerosol deposition method
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01-12-2016)“…Aerosol deposition (AD) method is technique for forming high-density ceramic films on substrate material surface at ambient temperature. The Y 2 O 3 film…”
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Conference Proceeding -
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Multiplicity and Lattice Relaxation of DX Center in AlGaAs:Si Studied by Electron Emission Spectra under Pressure
Published in Japanese Journal of Applied Physics (01-01-1993)“…DX center in Al 0.3 Ga 0.7 As:Si consists of four components, of which each component has the same thermal activation energy(0.41±0.02eV). The activation…”
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Effects of a quartz beam-guide on high-precision laser-assisted etching of Al2O3 ceramics
Published in Surface & coatings technology (01-02-1999)Get full text
Conference Proceeding Journal Article -
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Effects of a quartz beam-guide on high-precision laser-assisted etching of Al 2O 3 ceramics
Published in Surface & coatings technology (1999)“…Laser-assisted chemical etching of ceramic materials has been attracting continuous attention as a laser microfabrication technique with relatively low power…”
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