Search Results - "Aritome, S"
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Improvement of Interpoly Dielectric Characteristics by Plasma Nitridation and Oxidation for Future nand Flash Memory
Published in IEEE electron device letters (01-11-2008)“…In this letter, plasma nitridation and oxidation on interpoly dielectric (IPD; SiO 2 -SiN-SiO 2 ) for cell programming speed and reliabilities are…”
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2
Stress-induced leakage current of tunnel oxide derived from flash memory read-disturb characteristics
Published in IEEE transactions on electron devices (01-02-1998)“…This paper describes the characteristics of the stress-induced leakage current of tunnel oxide derived from flash memory read-disturb characteristics. The…”
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3
Reliability issues of flash memory cells
Published in Proceedings of the IEEE (01-05-1993)“…Reliability issues for flash electrically erasable programmable read-only memories are reviewed. The reliability of both the source-erase type (ETOX) flash…”
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4
A compact on-chip ECC for low cost flash memories
Published in IEEE journal of solid-state circuits (01-05-1997)“…A compact on-chip error correcting circuit (ECC) for low cost flash memories has been developed. The total increase in chip area is 2%, including all cells,…”
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5
A side-wall transfer-transistor cell (SWATT cell) for highly reliable multi-level NAND EEPROMs
Published in IEEE transactions on electron devices (01-01-1997)“…A multi-level NAND Flash memory cell, using a new Side-WAll Transfer-Transistor (SWATT) structure, has been developed for a high performance and low bit cost…”
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6
Advanced flash memory technology and trends for file storage application
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)“…This paper describes a high density flash memory technology suitable for file storage application. Requirements for file storage memory are low cost,…”
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Conference Proceeding -
7
Novel Negative Vt Shift Phenomenon of Program-Inhibit Cell in \hboxX\hboxX\hbox\hbox Self-Aligned STI nand Flash Memory
Published in IEEE transactions on electron devices (01-11-2012)“…A novel program-inhibit phenomenon of "negative" cell Vt shift has been investigated for the first time in 2 X - 3 X -nm self-aligned shallow trench isolation…”
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8
Advanced DC-SF Cell Technology for 3-D NAND Flash
Published in IEEE transactions on electron devices (01-04-2013)“…Advanced dual control gate with surrounding floating gate (DC-SF) cell process and operation schemes are successfully developed for 3-D nand flash memories. To…”
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9
Scaling of tunnel oxide thickness for flash EEPROMs realizing stress-induced leakage current reduction
Published in Digest of technical papers - Symposium on VLSI Technology (01-01-1994)“…Through the use of a lower impurity concentration in the gate poly-Si and lowering the post-annealing temperature, a highly reliable tunnel oxide…”
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10
Low-temperature nitridation of fluorinated silicon dioxide films in ammonia gas
Published in Applied physics letters (28-09-1987)“…A new technique of growing nitrided oxide at low temperatures has been developed. Fluorine-enhanced thermal oxidation of silicon in O2+NF3 at temperatures…”
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11
BiCMOS circuit technology for high-speed DRAMs
Published in IEEE journal of solid-state circuits (01-01-1993)“…A BiCMOS circuit technology featured by a novel bit-line sense amplifier has been developed. The bit-line sense amplifier is composed of a BiCMOS differential…”
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12
An experimental 4-Mbit CMOS EEPROM with a NAND-structured cell
Published in IEEE journal of solid-state circuits (01-10-1989)“…A 5-V-only high-density (512 K*8 bit) electrically erasable and programmable read-only memory (EEPROM) has been designed and fabricated by using a…”
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13
Low-temperature SiO2 growth using fluorine-enhanced thermal oxidation
Published in Applied physics letters (01-08-1985)“…A new low-temperature oxidation technique of silicon to obtain high quality Si-SiO2 interface and bulk SiO2 layer is presented. A few tens-nanometer-thick…”
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14
Fluorine-enhanced photo-oxidation of silicon under ArF excimer laser irradiation in an O2 + NF3 gas mixture
Published in Applied physics letters (22-09-1986)“…We have studied fluorine-enhanced oxidation of silicon in an O2+NF3 gas mixture under ArF excimer laser (193 nm) irradiation. An oxide layer of more than 60 Å…”
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15
A high-density NAND EEPROM with block-page programming for microcomputer applications
Published in IEEE journal of solid-state circuits (01-04-1990)“…A high-density, 5-V-only, 4-Mb CMOS EEPROM with a NAND-structured cell using Fowler-Nordheim tunneling for programming is discussed. The block-page mode is…”
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16
A novel Multi - Nitridation ONO interpoly dielectric (MN-ONO) for highly reliable and high performance NAND Flash memory
Published in 2009 International Symposium on VLSI Technology, Systems, and Applications (01-04-2009)“…Multi-Nitridation ONO has been demonstrated for the first time. Significant improvement are obtained in NAND Flash performance and reliability. (1) 1V program…”
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Conference Proceeding -
17
Improvement of Interpoly Dielectric Characteristics by Plasma Nitridation and Oxidation for Future @@inand@ Flash Memory
Published in IEEE electron device letters (01-11-2008)“…In this letter, plasma nitridation and oxidation on interpoly dielectric (IPD; SiO@@d2@-SiN-SiO@@d2@ ) for cell programming speed and reliabilities are…”
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Journal Article -
18
Highly reliable 26nm 64Gb MLC E2NAND (Embedded-ECC & Enhanced-efficiency) flash memory with MSP (Memory Signal Processing) controller
Published in 2011 Symposium on VLSI Technology - Digest of Technical Papers (01-06-2011)“…A highly reliable 26nm 64GB MLC E2NAND (E2: Embedded-ECC & Enhanced-efficiency) flash memory has been successfully developed. To overcome scaling challenges,…”
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Conference Proceeding -
19
A novel surface-oxidized barrier-SiN cell technology to improve endurance and read-disturb characteristics for gigabit NAND flash memories
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)“…This paper describes a novel surface-oxidized barrier-SiN cell technology to effect a tenfold improvement in endurance and read disturb characteristics. In…”
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Conference Proceeding -
20
A New Metal Control Gate Last process (MCGL process) for high performance DC-SF (Dual Control gate with Surrounding Floating gate) 3D NAND flash memory
Published in 2012 Symposium on VLSI Technology (VLSIT) (01-06-2012)“…A new Metal Control Gate Last process (MCGL process) has been successfully developed for the DC-SF (Dual Control gate with Surrounding Floating gate cell)[1]…”
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Conference Proceeding