Search Results - "Apblett, C.A."
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Development of a Bi2Te3-based thermoelectric generator with high-aspect ratio, free-standing legs
Published in Journal of materials research (28-04-2012)“…A bismuth telluride alloy-based thermoelectric generator with high-aspect ratio, free-standing legs was fabricated. Such legs are desirable for efficient…”
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Journal Article Conference Proceeding -
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Composition analysis of ECR-grown SiO2 and SiOxFy films
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-09-1996)Get full text
Journal Article -
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Development of a Bi 2 Te 3 -based thermoelectric generator with high-aspect ratio, free-standing legs
Published in Journal of materials research (28-04-2012)“…A bismuth telluride alloy-based thermoelectric generator with high-aspect ratio, free-standing legs was fabricated. Such legs are desirable for efficient…”
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Journal Article -
4
Composition analysis of ECR-grown SiO 2 and SiO xF y films
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (1996)“…Low dielectric constant insulating films, such as SiO 2 and fluorine doped SiO x , are an important class of materials in semiconductor manufacturing…”
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Journal Article -
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Characterization of thin copper films grown via chemical vapor deposition using liquid coinjection of trimethylvinylsilane and (hexafluoroacetylacetonate) Cu (trimethylvinylsilane)
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-01-1995)“…We have developed a technique recently for copper chemical vapor deposition utilizing direct liquid coinjection of trimethylvinylsilane (TMVS) and the copper…”
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Journal Article