Search Results - "Aoki, Nobutoshi"
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Effect of the Titanium Nanoparticle on the Quantum Chemical Characterization of the Liquid Sodium Nanofluid
Published in The journal of physical chemistry. B (14-04-2016)“…Suspension state of a titanium nanoparticle in the liquid sodium was quantum chemically characterized by comparing physical characteristics, viz., electronic…”
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Advantage of Plasma Doping for Source/Drain Extension in Bulk Fin Field Effect Transistor
Published in Japanese Journal of Applied Physics (01-04-2011)“…The impact of plasma doping (PD) on the formation of source/drain extension (SDE) is demonstrated for a p-type bulk fin field effect transistor (FinFET). The…”
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Contribution of Carbon to Activation and Diffusion of Boron in Silicon
Published in Japanese Journal of Applied Physics (01-04-2010)“…It is well-known that the coimplantation of carbon (C) in a concentration range comparable to the range of boron (B) concentrations could suppress B diffusion,…”
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Thermal-Annealing Effects on Dopant Redistribution in Nanoscale Si Fin
Published in Japanese Journal of Applied Physics (01-07-2011)Get full text
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5
Advantage of Plasma Doping for Source/Drain Extension in Bulk Fin Field Effect Transistor
Published in Japanese Journal of Applied Physics (01-04-2011)Get full text
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6
In situ Doped Embedded-SiGe Source/Drain Technique for 32 nm Node p-Channel Metal–Oxide–Semiconductor Field-Effect Transistor
Published in Japanese Journal of Applied Physics (01-04-2008)Get full text
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Depletion-Type Cell-Transistor on Partial Silicon-on-Insulator Substrate for 2× nm Generation Floating-Gate NAND Electrically Erasable Programmable Read Only Memory
Published in Japanese Journal of Applied Physics (01-04-2010)“…To reduce the short-channel effect for memory cell transistors beyond 2× nm cell size for NAND electrically erasable programmable read only memories (EEPROMs),…”
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Grain-boundary-limited carrier mobility in polycrystalline silicon with negative temperature dependence: modeling carrier conduction through grain-boundary traps based on trap-assisted tunneling
Published in Japanese Journal of Applied Physics (01-04-2019)“…Seto's model based on thermionic emission (TE) theory explains that the grain-boundary (GB)-limited carrier mobility in polycrystalline silicon (poly-Si) has a…”
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Ultra high dose boron ion implantation: super-saturation of boron and its application
Published in Materials chemistry and physics (01-07-1998)“…Super-saturation of dopant atoms in silicon has been attracting interest because a high concentration of carriers in silicon is required in practical…”
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Journal Article Conference Proceeding -
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Dominant Factor for the Concentration of Phosphorus Introduced by Vapor Phase Doping (VPD)
Published in Japanese Journal of Applied Physics (01-03-1998)“…The dominant factor for the surface concentration of n-type impurity, introduced by vapor phase doping technique using phosphine, was investigated and the…”
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11
Source/drain engineering for MOSFETs with embedded-Si:C technology
Published in Applied surface science (30-07-2008)“…Embedded silicon carbon alloy (e-Si:C) technology for source and drain (S/D) is expected to improve nMOSFET drive current. The distribution and activation…”
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Journal Article Conference Proceeding -
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Direct evaluation of DC characteristic variability in FinFET SRAM Cell for 32 nm node and beyond
Published in 2007 IEEE International Electron Devices Meeting (01-01-2007)“…V t variability in FinFET SRAM is evaluated for the first time by direct measurement of the cell transistors down to 25 nm gate length. By taking the V,…”
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Conference Proceeding -
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Atomistic study of sulfur diffusion and S2 formation in silicon during low-temperature rapid thermal annealing
Published in 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01-09-2013)“…Theoretical analyses predict that large Schottky barrier reduction by sulfur doping at NiSi/Si junction is induced by S2 formation. The S2 formation may have…”
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Conference Proceeding -
14
Thermal-Annealing Effects on Dopant Redistribution in Nanoscale Si Fin
Published in Japanese Journal of Applied Physics (01-07-2011)“…We investigated the diffusion of implanted boron and phosphorous in a narrow Si fin during rapid thermal annealing (RTA) at 1000 °C for 10 s. We found that the…”
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A high performance pMOSFET with two-step recessed SiGe-S/D structure for 32 nm node and beyond
Published in Solid-state electronics (01-11-2007)“…A novel SiGe-S/D structure for high performance pMOSFET called two-step recessed SiGe-source/drain (S/D) is developed with careful optimization of recessed…”
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Journal Article Conference Proceeding -
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Depletion-Type Cell-Transistor on Partial Silicon-on-Insulator Substrate for $2\times$ nm Generation Floating-Gate NAND Electrically Erasable Programmable Read Only Memory
Published in Jpn J Appl Phys (25-04-2010)“…To reduce the short-channel effect for memory cell transistors beyond $2\times$ nm cell size for NAND electrically erasable programmable read only memories…”
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17
A high performance pMOSFET with two-step recessed SiGe-S/D structure for 32nm node and beyond
Published in Solid-state electronics (01-11-2007)Get full text
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Modeling of Electron Mobility Degradation for HfSiON MISFETs
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01-09-2006)“…The electron mobility degradation for HfSiON MISFETs was investigated. We found that the degradation had two origins; one is Coulomb scattering caused by fixed…”
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Conference Proceeding -
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Compact and Efficient Monte Carlo Method to Reproduce Size Effect on Resistivity in Sub-0.1μm Metallic Interconnects
Published in 2009 International Conference on Simulation of Semiconductor Processes and Devices (01-09-2009)“…We present a compact and efficient Monte Carlo method to reproduce a size effect on resistivity in sub-0.1 mum metallic interconnects. Implementation of our…”
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Conference Proceeding -
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Deactivation mechanism of In atoms doped in a Si crystal and reactivation due to codoping with B and C
Published in Physical review. B, Condensed matter and materials physics (01-05-2005)Get full text
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