Search Results - "Alvis, Roger L"
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Atom Probe Tomography of Electronic Materials
Published in Annual review of materials research (01-01-2007)“…The state of application of atom probe tomography to electronic materials is assessed. The benefits and challenges of the technique are discussed with regard…”
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Journal Article -
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Atom probe tomography today
Published in Materials today (Kidlington, England) (01-12-2007)“…This review aims to describe and illustrate the advances in the application of atom probe tomography that have been made possible by recent developments,…”
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Journal Article -
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Abbreviated tomography techniques for quick correction of slides in 3-Dimensional NAND Flash architectures
Published in 2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (18-07-2022)“…A high stack structure is being developed to increase the 3D NAND Flash storage capacity. However, problems such as bowing, incomplete etching, and twisting…”
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Conference Proceeding -
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Three-dimensional atomic-scale mapping of Pd in Ni1−xPdxSi∕Si(100) thin films
Published in Applied physics letters (10-09-2007)“…Atom-probe tomography was utilized to map the three-dimensional distribution of Pd atoms in nickel monosilicide thin films on Si(100). A solid-solution…”
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Journal Article -
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Three-dimensional atomic-scale mapping of Pd in Ni 1 − x Pd x Si ∕ Si ( 100 ) thin films
Published in Applied physics letters (12-09-2007)“…Atom-probe tomography was utilized to map the three-dimensional distribution of Pd atoms in nickel monosilicide thin films on Si(100). A solid-solution Ni 0.95…”
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Journal Article