Search Results - "Altpeter, D.M."
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1
Integrated Lithographic Molding for Microneedle-Based Devices
Published in Journal of microelectromechanical systems (01-08-2007)“…This paper presents a new fabrication method consisting of lithographically defining multiple layers of high aspect-ratio photoresist onto preprocessed silicon…”
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Journal Article -
2
A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing
Published in 2006 European Solid-State Device Research Conference (01-09-2006)“…This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for…”
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Conference Proceeding