Search Results - "Altkorn, Robert I."
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1
Surface Raman spectroscopy as an in-situ probe of laser micro chemical processes
Published in IEEE circuits and devices magazine (01-01-1986)“…Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. The authors briefly review the technique known as…”
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Journal Article -
2
Surface Raman spectroscopy as an in-situ probe of laser microchemical processes
Published in IEEE circuits and devices magazine (01-01-1986)“…Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. The authors briefly review the technique known as…”
Get full text
Journal Article