Search Results - "Abedinov, N."
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Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2003)“…This article describes microprobes for noncontact scanning force microscopy that make use of a direct-oscillating thermally driven bimorph actuator with…”
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Conference Proceeding -
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Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-11-2001)“…We describe a microcantilever calorimeter consisting of an array of ten cantilevers. Each single cantilever is capable of detecting heat energy with the…”
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Journal Article -
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Thermal nano-probe
Published in Microelectronic engineering (01-09-2001)“…The novel thermal probe presented here is based on the changes of the electrical resistivity of a nanometer-sized filament with temperature. The filament is…”
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Journal Article Conference Proceeding -
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Switching of magnetostrictive micro-dot arrays by mechanical strain
Published in IEEE transactions on magnetics (01-10-2005)“…This paper investigates the switching behavior of magnetostrictive micro-dot arrays by mechanical strain. These amorphous FeCoBSi micro-dot arrays with…”
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Journal Article Conference Proceeding -
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SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis
Published in Microelectronic engineering (01-07-2002)“…In scanning near field optical microscopy (SNOM), an optical probe with aperture diameter well below the optical wavelength is moved just over the sample. We…”
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Journal Article Conference Proceeding -
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Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission
Published in Microelectronic engineering (01-09-2001)“…The MIDAS (Micro-Imaging Dust Analysis System) experiment is dedicated to the micro-textural and statistical analysis of cometary dust particles. The…”
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Journal Article Conference Proceeding -
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Stress analysis in Si membranes for open stencil masks and mini-reticles using double bulging and resonance methods
Published in Microelectronic engineering (01-09-2001)“…This paper presents two measurement methods for stress determination of Si-membranes. The first one is based on the bulging method. This method was modified by…”
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Journal Article Conference Proceeding -
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Chemical recognition based on micromachined silicon cantilever array
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2003)“…We report on the performance of a measurement system for the recognition of individual analytes and their binary mixtures which is based on a multiarray of…”
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Conference Proceeding -
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Fabrication and properties of piezoresistive cantilever beam with porous silicon element
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-01-2003)“…We present a highly sensitive nanobalance based on a piezoresistive cantilever beam with a porous silicon element. Measurements of a shift of the cantilever…”
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Journal Article -
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Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films
Published in Advanced materials (Weinheim) (01-05-2000)“…Electronic noses based on polymer‐like carbon nitride (CNx) are investigated by these authors. The gas‐sensing properties of CNx are examined, focusing on the…”
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Journal Article -
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Switching of magnetostrictive micro-dot arrays by mechanical strain
Published in INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005 (2005)“…CoFeBSi and FeCo magnetostrictive micro-and nano-dot arrays are fabricated on Si/sub 3/N/sub 4/ membranes with different diameters (50 to 300 /spl mu/m) by…”
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Conference Proceeding